San Jose, CA, United States of America

Anthony Lam


Average Co-Inventor Count = 4.6

ph-index = 4

Forward Citations = 524(Granted Patents)


Company Filing History:


Years Active: 1999-2001

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4 patents (USPTO):Explore Patents

Title: The Innovations of Anthony Lam

Introduction

Anthony Lam is a notable inventor based in San Jose, CA. He has made significant contributions to the field of technology, particularly in the area of dielectric layer deposition. With a total of 4 patents to his name, Lam's work has had a considerable impact on the industry.

Latest Patents

Among his latest patents is a method and apparatus for improving gap-fill capability using chemical and physical etchbacks. This innovative method involves depositing a dielectric layer to fill in gaps between adjacent metal lines. In preferred embodiments, a first dielectric layer is deposited over the lines and subsequently etched using both chemical and physical etchback steps. After completing the etchback steps, a second dielectric layer is deposited over the first layer to effectively fill in the gap. This patent showcases Lam's expertise in enhancing manufacturing processes in semiconductor technology.

Career Highlights

Throughout his career, Anthony Lam has worked with prominent companies such as Applied Materials, Inc. and 2c Optics, Inc. His experience in these organizations has allowed him to refine his skills and contribute to various innovative projects.

Collaborations

Some of his notable coworkers include Soonil Hong and Choon Kun Ryu. Their collaboration has likely fostered an environment of creativity and innovation, leading to advancements in their respective fields.

Conclusion

Anthony Lam's contributions to technology through his patents and career experiences highlight his role as a significant inventor in the industry. His innovative methods continue to influence advancements in semiconductor manufacturing processes.

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