Anthony J Ricci

Title: The Innovations of Anthony J Ricci

Introduction

Anthony J Ricci is a notable inventor based in Hopewell Junction, NY (US). He has made significant contributions to the field of electrostatic technology, particularly in the design and functionality of electrostatic chucks.

Latest Patents

Ricci holds a patent for the "Characterization, modeling, and design of an electrostatic chuck." This invention enhances temperature uniformity and adjustment capabilities of the surface of a wafer or wafer-like workpiece during processing. The electrostatic chuck (ESC) is particularly useful in environments such as electron-cyclotron-resonance chemical vapor deposition (ECR-CVD) reactors. The design features an improved pattern of grooves that allows an inert gas to be contained between the ESC and the wafer, even at high vacuum levels. The ESC can be tailored for specific temperature ranges by adjusting the surface roughness of its face, while the electrostatic voltage variation enables precise temperature control.

Career Highlights

Ricci is associated with the International Business Machines Corporation, commonly known as IBM. His work at IBM has allowed him to explore and innovate in the realm of electrostatic technologies, contributing to advancements in semiconductor processing.

Collaborations

Throughout his career, Ricci has collaborated with esteemed colleagues such as Kurt A Olson and Anwar Husain. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.

Conclusion

Anthony J Ricci's contributions to the field of electrostatic technology exemplify the impact of innovative thinking in engineering. His patent for the electrostatic chuck demonstrates a significant advancement in wafer processing technology.