San Jose, CA, United States of America

Anne C Shartel


Average Co-Inventor Count = 2.9

ph-index = 2

Forward Citations = 209(Granted Patents)


Location History:

  • San Jose, CA (US) (1982)
  • Pleasant Valley, NY (US) (1987)

Company Filing History:


Years Active: 1982-1987

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2 patents (USPTO):

Title: Innovations by Anne C Shartel

Introduction

Anne C Shartel is a notable inventor based in San Jose, CA. She has made significant contributions to the field of semiconductor technology. With a total of 2 patents, her work has advanced the understanding and application of various semiconductor processes.

Latest Patents

One of her latest patents is titled "Trench sidewall isolation by polysilicon oxidation." This patent discloses a process for growing a conformal and etch-resistant silicon dioxide on a surface. The method involves forming a conformal layer of polysilicon and subjecting it to thermal oxidation, converting the polysilicon into (poly) silicon oxide. This innovation allows for the creation of an isolation trench in a semiconductor substrate with high integrity oxide sidewalls. The resulting (poly) silicon oxide exhibits the conformality of CVD oxide and the high etch resistance of thermally grown oxide.

Another significant patent is the "Planar semiconductor three direction acceleration detecting device." This device features a v-shaped cavity in a planar semiconductor substrate, which includes a thin-walled v-shaped cantilever beam. The beam is designed to move in directions normal to and laterally of the substrate plane, enabling the detection of acceleration in both directions. The device utilizes n-type silicon and incorporates variable capacitors to resolve the bidirectional movement of the beam.

Career Highlights

Anne C Shartel is currently employed at International Business Machines Corporation (IBM). Her work at IBM has allowed her to explore and develop innovative semiconductor technologies that have practical applications in various industries.

Collaborations

Throughout her career, Anne has collaborated with notable colleagues, including Inge G Fulton and James S Makris. These collaborations have contributed to the advancement of her research and the successful development of her patents.

Conclusion

Anne C Shartel's contributions to semiconductor technology through her patents demonstrate her innovative spirit and dedication to advancing the field. Her work continues to influence the industry and inspire future innovations.

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