Company Filing History:
1 out of 2,297 
1 out of 2,019 
Years Active: 1998-2000
Title: Ann C Westerheim: Innovator in Electromigration and Plasma Etching Technologies
Introduction
Ann C Westerheim is a notable inventor based in Westford, MA (US). She has made significant contributions to the fields of electromigration and plasma etching technologies. With a total of 2 patents, her work has had a substantial impact on the semiconductor industry.
Latest Patents
Westerheim's latest patents include innovative methods that enhance the reliability and efficiency of semiconductor manufacturing processes. One of her patents describes an electromigration-resistant via structure. This method involves forming an electromigration-resistant intermetallic region beneath and adjacent to a conductive plug in a via. The preferred materials for this region are a sintered intermetallic compound of aluminum and titanium, while the conductive plug is made of tungsten.
Another significant patent focuses on a methodology for in situ etch stop detection and control of plasma. This method outlines a process for etching a dielectric layer to create a via to an underlying conductive layer. It includes monitoring electromagnetic energy from plasma emission radiation to determine the ratio of species in the plasma, which indicates the onset of an etch stop phenomenon. The etching process continues until the ratio of etchants exceeds a predetermined threshold value, at which point the process is halted, and the plasma reactor is cleaned.
Career Highlights
Throughout her career, Ann C Westerheim has worked with prominent companies in the technology sector. She has held positions at Digital Equipment Corporation and Compaq Computer Corporation, Inc. Her experience in these organizations has allowed her to develop and refine her innovative techniques in semiconductor manufacturing.
Collaborations
Westerheim has collaborated with several notable professionals in her field, including Timothy J Dalton and Jamshed Hoshang Dubash. These collaborations have contributed to her success and the advancement of her research.
Conclusion
Ann C Westerheim is a distinguished inventor whose work in electromigration and plasma etching technologies has significantly influenced the semiconductor industry. Her innovative patents and career achievements reflect her dedication to advancing technology and improving manufacturing processes.