The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2000
Filed:
Jul. 28, 1998
Applicant:
Inventors:
Tirunelveli S Sriram, Maynard, MA (US);
Ann C Westerheim, Westford, MA (US);
John J Maziarz, Sutton, MA (US);
Vladimir Bolkhovsky, Framingham, MA (US);
Assignee:
Compaq Computer Corporation, Houston, TX (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438643 ; 438688 ; 438648 ; 438685 ; 438672 ; 438675 ;
Abstract
A method is described for forming an electromigration-resistant (ER) intermetallic region beneath and adjacent a conductive plug in a via. Preferably the ER region is formed of a sintered intermetallic compound of Al and Ti, and the conductive plug is formed of W.