This inventor holds 1 USPTO granted patent. Top assignee: Lam Research Corporation. Active years: 2005.
Company Filing History:
Years Active: 2005
Title: **Innovator Spotlight: Andrew S. Li**
Introduction
Andrew S. Li is an accomplished inventor based in Fremont, CA, specializing in semiconductor manufacturing processes. His innovative contributions have significantly advanced the field of semiconductor fabrication, particularly through his unique methods that enhance the efficiency of manufacturing techniques.
Latest Patents
Andrew holds a patent for a groundbreaking invention titled "Method of Plasma Etching Silicon Nitride." This patent highlights a semiconductor manufacturing process wherein silicon nitride is plasma etched with selectivity to overlying and/or underlying dielectric layers like silicon oxide or low-k materials. The process involves using an etchant gas that includes a fluorocarbon reactant and an oxygen reactant, carefully balancing their flow rates to achieve an etch rate for silicon nitride that is at least five times higher than that of silicon oxide. This innovative method allows for notable etch rate selectivities, exceeding 40:1, which is particularly beneficial for the creation of structures in semiconductor devices.
Career Highlights
Andrew S. Li is currently employed at Lam Research Corporation, a prominent entity in the semiconductor industry known for its cutting-edge technology and innovative solutions. His role there involves spearheading advancements in plasma etching techniques, which are critical for the manufacture of advanced electronic devices.
Collaborations
Andrew has had the opportunity to collaborate with noted colleagues, including Helen H. Zhu and David R. Pirkle. Their combined expertise contributes to a robust atmosphere of innovation and engineering excellence at Lam Research Corporation, fostering the development of groundbreaking semiconductor manufacturing processes.
Conclusion
Andrew S. Li's inventive spirit and commitment to advancing semiconductor technologies have positioned him as a noteworthy figure in the industry. His patented methods not only streamline the manufacturing process but also open new avenues for achieving precision in semiconductor design. Andrew’s contributions underscore the importance of innovation in driving forward technological progress within the semiconductor landscape.