Company Filing History:
Years Active: 2009-2014
Title: Andrew S. Gillard: Innovator in Electromagnetic Technology
Introduction
Andrew S. Gillard is a prominent inventor based in Mountain View, CA (US). He has made significant contributions to the field of electromagnetic technology, holding a total of 4 patents. His work primarily focuses on advancements in plasma processing chambers, which are crucial for various applications in semiconductor manufacturing.
Latest Patents
One of his latest patents is titled "Electromagnet array in a sputter reactor." This invention describes a multi-step process performed in a plasma sputter chamber, which includes sputter deposition from the target and argon sputter etching of the substrate. The chamber features a quadruple electromagnetic coil array that is coaxially arranged in a rectangular formation around the chamber axis. This innovative design allows for separate control of coil currents, enabling different magnetic field distributions for various operational modes. Another notable patent is the "Encapsulated and water cooled electromagnet array." This invention consists of multiple electromagnetic coils encapsulated in a rigid structure, which can be placed around the walls of a plasma processing chamber. The design also incorporates a liquid cooling coil and various fittings for enhanced functionality.
Career Highlights
Andrew S. Gillard is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work at Applied Materials has allowed him to push the boundaries of electromagnetic technology and contribute to the advancement of plasma processing techniques.
Collaborations
Throughout his career, Andrew has collaborated with notable colleagues, including Tza-Jing Gung and Mark A. Perrin. These collaborations have further enriched his work and led to innovative solutions in the field.
Conclusion
Andrew S. Gillard is a distinguished inventor whose contributions to electromagnetic technology have significantly impacted the semiconductor industry. His innovative patents and collaborative efforts continue to drive advancements in plasma processing technology.