Company Filing History:
Years Active: 2011-2014
Title: The Innovative Contributions of Andrew R. Romano
Introduction
Andrew R. Romano is a notable inventor based in Pleasanton, CA (US). He has made significant contributions to the field of technology, particularly in the area of photoresist applications. With a total of 4 patents to his name, Romano's work has had a considerable impact on the industry.
Latest Patents
Romano's latest patents include a "Photoresist Double Patterning Apparatus" and a "Protective Layer for Implant Photoresist." The Photoresist Double Patterning Apparatus is designed for etching an etch layer formed on a substrate. This apparatus utilizes a first photoresist mask with first mask features and performs a process that includes a deposition phase and a profile shaping phase. The method allows for the application of a liquid photoresist material over the first mask, which is then patterned into second mask features, enabling the etching of the etch layer through the second mask.
The second patent, "Protective Layer for Implant Photoresist," outlines a method for implanting a dopant in a substrate. This involves forming a patterned photoresist mask over the substrate and depositing a protective layer through cyclical deposition. Each cycle consists of a depositing phase and a profile shaping phase, which ensures vertical sidewalls. The method culminates in the implantation of a dopant into the substrate using an ion beam, followed by the removal of the protective layer and photoresist mask.
Career Highlights
Andrew R. Romano is currently employed at Lam Research Corporation, where he continues to innovate and contribute to advancements in technology. His work is characterized by a focus on improving processes related to photoresist materials and their applications in semiconductor manufacturing.
Collaborations
Romano has collaborated with notable coworkers such as S. M. Reza Sadjadi and Lumin Li, further enhancing the innovative environment at Lam Research Corporation.
Conclusion
Andrew R. Romano's contributions to the field of technology through his patents and work at Lam Research Corporation highlight his role as a significant inventor. His innovative approaches to photoresist applications continue to influence the industry and pave the way for future advancements.
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