This inventor holds 3 USPTO granted patents. Top assignees: Siemens Aktiengesellschaft, Kabushiki Kaisha Toshiba, Siemens Microelectronics Limited. Active years: 2000.
Company Filing History:
2 out of 30,867 
1 out of 53,250 
1 out of 19 Years Active: 2000
Title: The Innovative Contributions of Andreas Grassmann
Introduction
Andreas Grassmann is a notable inventor based in Bad Abbach, Germany. He has made significant contributions to the field of lithography, particularly in the production of mask blanks and the control of critical dimensions in lithographic systems. With a total of 3 patents to his name, Grassmann's work has had a considerable impact on the industry.
Latest Patents
Grassmann's latest patents include innovative methods for producing mask blanks. One of his patents describes a process where a shading film of chrome is formed entirely on one surface of a circular quartz substrate. The substrate is rotated, allowing the resist to spread uniformly across the shading film due to centrifugal force. This results in a substantially uniform film thickness over the surface. The resist is then patterned to create a resist pattern, which is used to etch the shading film, achieving high accuracy in dimensions.
Another significant patent focuses on improving control of critical dimensions in lithographic systems. This system incorporates a detector that measures the energy absorbed by the photoresist. By ensuring that each field is exposed with the required dose, Grassmann's invention reduces variations in critical dimensions, enhancing the overall precision of the lithographic process.
Career Highlights
Throughout his career, Grassmann has worked with prominent companies such as Siemens and Toshiba. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking advancements in lithography.
Collaborations
Grassmann has collaborated with esteemed colleagues, including Katsuhiko Hieda and Thomas Fischer. These partnerships have fostered an environment of innovation and have led to the development of advanced technologies in the field.
Conclusion
Andreas Grassmann's contributions to the field of lithography through his patents and collaborations highlight his role as a significant inventor. His innovative methods and dedication to precision continue to influence the industry today.