Amy L Myrick

Title: The Innovative Contributions of Amy L Myrick

Introduction

Amy L Myrick is a remarkable inventor based in Waterbury Ctr., VT, USA. With two patents to her name, she has made significant contributions to the field of semiconductor technology. Myrick's innovative spirit and dedication to her work exemplify the qualities that drive progress in engineering and technology.

Latest Patents

One of her latest patents is a Metal Oxide Temperature Monitor. This invention serves as a method and structure for monitoring temperature and temperature distributions within a heating chamber used in the fabrication of semiconductor devices. The process begins with a copper layer deposited on a semiconductor wafer, which is then heated in an oxygen atmosphere to temperatures ranging from 200 to 600 °C. The heating oxidizes part of the copper layer, forming an oxide layer. Following this, the wafer's sheet resistance is measured at various points, revealing a spatial distribution that reflects the wafer's temperature. This information can then be used to adjust heat input to achieve a more uniform temperature distribution for subsequent wafers. The monitor's design also allows for reconditioning by heating in a hydrogen environment, reverting the oxide layer back to unoxidized copper. Additionally, the oxide layer presents a color that correlates with its thickness, providing an estimate of the temperature reached during the heating process.

Career Highlights

Amy Myrick’s career has been defined by her innovative contributions to technology at the International Business Machines Corporation (IBM). Her work alongside a team of skilled professionals exemplifies the kind of collaborative environment that fosters technological advancement.

Collaborations

Throughout her career, Amy has collaborated with esteemed colleagues such as Arne Watson Ballantine and Edward Crandal Cooney, III. These collaborations not only enhance her inventions but also contribute to a shared vision of progress within the tech industry.

Conclusion

Amy L Myrick stands out as a key figure in the realm of semiconductor technology, with her pioneering Metal Oxide Temperature Monitor reflecting her inventive spirit. Her patents signify not only her individual contributions but also the collaborative efforts that push the boundaries of innovation in technology. As she continues her work at IBM, the impact of her inventions is sure to resonate throughout the industry for years to come.