Amir Arbabi

Title: Amir Arbabi: Innovator in Nanoscale Monitoring and Control

Introduction

Amir Arbabi is a prominent inventor based in Urbana, IL (US). He has made significant contributions to the field of nanoscale monitoring and control, holding 2 patents that showcase his innovative approach to technology.

Latest Patents

One of Amir Arbabi's latest patents is titled "Optically Monitoring and Controlling Nanoscale Topography." This invention involves methods and apparatus for characterizing a height profile of a scattering surface relative to a fiducial plane. The scattering surface, which may be an interface between distinct solid, liquid, gaseous, or plasma phases, is illuminated with substantially spatially coherent light. Light scattered by the scattering surface is collected and dispersed, such as by a grating, into zeroth- and first-order beams. A spatial Fourier transform of the zeroth- and first-order beams is created, and one of the beams is low-pass filtered. The beams are interfered at a focal plane detector to generate an interferogram, which is transformed to retrieve a spatially resolved quantitative phase image and/or an amplitude image of the scattering surface. Imaging may be performed during an etching process and may be used to adaptively control a photoetching process in a feedback loop.

Another notable patent is "Distributed Reflector in a Microring Resonator." This invention describes a component having a microring resonator and grating, coupled to a waveguide. By selecting the grating period and other parameters such as the grating-waveguide coupling coefficient, an efficient filter may be designed and constructed. The component may be used in passive devices such as add-drop multiplexers or sensors, or in active devices such as lasers. Designs having essentially no response sidelobes, very narrow effective bandwidths, and fast filter roll-offs may permit compact devices to be produced, compared with typical distributed sampled Bragg grating structures.

Career Highlights

Amir Arbabi is affiliated with the University of Illinois, where he continues to advance his research and innovations in the field of optics and photonics. His work has garnered attention for its potential applications in various technological domains.

Collaborations

Amir has collaborated with notable colleagues, including Lynford L Goddard and Gabriel Popescu, contributing to a rich environment of innovation and research.

Conclusion