Allan Paterson

Title: Innovations of Allan Paterson: Pioneering Semiconductor Inspection and Active Gimbal Technology

Introduction

Allan Paterson, based in Austin, TX, has made significant contributions to the field of semiconductor technology through his innovative inventions. With a total of two patents to his name, he has developed methods that enhance semiconductor wafer analysis and improve polishing systems used in the industry.

Latest Patents

Allan Paterson's latest patents showcase his expertise in semiconductor technology. His first patent, titled "Method of preparing whole semiconductor wafer for analysis," presents a unique method for preparing a semiconductor wafer for whole wafer backside inspection. This method involves covering the front side of the wafer with a protective substrate and thinning the backside using conventional techniques. After polishing the backside, a transparent substrate is adhered to it, allowing for thorough device inspection while maintaining accessibility for backside inspection techniques such as emission microscopy.

The second patent, "Active gimbal ring with internal gel and methods for making same," describes an advanced chemical mechanical planarization (CMP) system. This system features a polishing pad, carrier plate, and wafer plate, all enhanced by an active gimbal defined by a circular hollow ring made of elastomeric material. The ring contains a gel-like material that flows when the wafer plate tilts, optimizing the polishing process and ensuring high-quality results.

Career Highlights

Throughout his career, Allan has worked with notable companies in the semiconductor industry, including Strasbaugh and Lam Research Corporation. His experience in these organizations has equipped him with a deep understanding of semiconductor processes and technologies.

Collaborations

Allan Paterson has also collaborated with industry professionals such as David G. Halley and John Boyd. These partnerships have contributed to his innovative approaches in developing advanced technologies in semiconductor inspection and processing.

Conclusion

Allan Paterson's inventions have played a pivotal role in advancing semiconductor analysis and polishing systems. His patents not only reflect his inventive capabilities but also demonstrate his commitment to improving technologies within the semiconductor industry. As he continues to contribute to this field, Allan Paterson remains an influential figure in the world of innovations and inventions.