Company Filing History:
Years Active: 1995
Title: Innovations of Alexis De Chambrier
Introduction
Alexis De Chambrier is a notable inventor based in Glendale, CA (US). He has made significant contributions to the field of plasma technology, particularly in the development of advanced deposition and etching apparatuses. His innovative work has led to the granting of a patent that showcases his expertise and creativity.
Latest Patents
One of Alexis De Chambrier's key patents is for a high-density plasma deposition and etching apparatus. This apparatus features a plasma source positioned above and in axial relationship to a substrate process chamber. The design includes a sapphire or alumina source tube, which is particularly effective for plasmas containing fluorine. The apparatus is equipped with both an inner and an outer magnetic coil, arranged to optimize the magnetic field within the process chamber. This configuration allows for extremely uniform processing, especially when utilizing a unique diamond-shaped pattern of gas feed lines.
Career Highlights
Alexis De Chambrier is associated with Plasma & Materials Technologies, Inc., where he applies his expertise in plasma technology. His work has been instrumental in advancing the capabilities of plasma deposition and etching processes, which are critical in various industrial applications.
Collaborations
Throughout his career, Alexis has collaborated with notable colleagues, including Gregor A Campbell and Robert W Conn. These partnerships have contributed to the development of innovative technologies and have enhanced the research environment in which he works.
Conclusion
In summary, Alexis De Chambrier is a distinguished inventor whose work in plasma technology has led to significant advancements in the field. His patent for a high-density plasma deposition and etching apparatus exemplifies his innovative spirit and technical expertise.