Company Filing History:
Years Active: 1986-1987
Title: Innovations by Alexander R. Shimkunas in X-ray Photolithography
Introduction
Alexander R. Shimkunas, an innovative inventor based in Palo Alto, CA, has made significant contributions to the field of X-ray photolithography. With a total of six patents to his name, his work has paved the way for advancements in manufacturing techniques critical to the semiconductor industry. His latest patents exhibit a combination of creativity and technical expertise, demonstrating his commitment to refining processes that are essential for producing high-quality masks in photolithography.
Latest Patents
Alexander's most recent patents focus on innovative processes for manufacturing masks used in X-ray photolithography. One notable patent describes a process that begins with a glass disk coated with boron nitride. This method involves removing a circular portion of the boron nitride to expose the glass, subsequently creating a structure where layers of polyimide and an x-ray opaque substance are deposited on the boron nitride membrane. The outcome is a refined mask that enhances the performance of photolithography processes.
Another patent presents an additive method for creating a mask. This technique includes coating a boron nitride layer with indium tin oxide, followed by an additional boron nitride layer that serves as a stencil during plating. This innovative approach utilizes materials that are both x-ray transparent, thereby streamlining the manufacturing process by eliminating the need to remove any components later.
Career Highlights
Throughout his career, Alexander R. Shimkunas has been aptly recognized for his technical proficiency and innovative mindset. His affiliation with Micronix Corporation has been instrumental in furthering his research and development endeavors. His patents reflect a deep understanding of material properties and their application in practical processes, showcasing his role as a leading figure in the industry.
Collaborations
In his journey as an inventor, Alexander has had the privilege of collaborating with several esteemed coworkers, including Barry Block and James J. LaBrie. These partnerships have provided a platform for sharing ideas and enhancing the scope of their collective innovations.
Conclusion
Alexander R. Shimkunas stands out as a significant contributor to the technological landscape surrounding X-ray photolithography. Through his innovative patents and dedicated work at Micronix Corporation, he continues to drive advancements that will shape the future of the semiconductor manufacturing industry. His ability to blend technical expertise with inventive thinking reinforces the importance of collaboration and innovation in achieving breakthroughs in technology.