This inventor holds 3 USPTO granted patents. Top assignee: International Business Machines Corporation. Active years: 1994-1997.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Palo Alto, CA (US) (1994 - 1995)
- Freemont, CA (US) (1997)
Company Filing History:
Years Active: 1994-1997
Title: Albert R Ellingboe: Innovator in Plasma Processing Technology
Introduction
Albert R Ellingboe is a notable inventor based in Palo Alto, CA (US). He has made significant contributions to the field of plasma processing, holding a total of 3 patents. His work focuses on improving the efficiency and effectiveness of ion implantation and contamination control in plasma processes.
Latest Patents
Ellingboe's latest patents include an innovative ion implantation helicon plasma source with magnetic dipoles. This invention discloses an ion implantation source designed to produce plasma with an electron cyclotron resonance zone. The system includes a chamber for plasma processing, equipped with extraction slits and antennas that generate an inductive/helicon plasma. Additionally, it features magnetic dipoles strategically placed to maintain plasma stability within the chamber.
Another significant patent addresses methods and apparatus for contamination control in plasma processing. This invention aims to reduce contamination levels during plasma processes by preventing the formation of particles and removing spontaneously formed particles. Techniques such as pulsing the plasma energy source and applying various forms of mechanical agitation are employed to enhance the cleanliness of the plasma environment.
Career Highlights
Albert R Ellingboe is currently associated with the International Business Machines Corporation (IBM). His work at IBM has allowed him to develop and refine technologies that are crucial for advancements in semiconductor manufacturing and plasma processing.
Collaborations
Ellingboe has collaborated with notable coworkers, including Kurt L Haller and John S McKillop. Their combined expertise has contributed to the successful development of innovative solutions in the field of plasma technology.
Conclusion
Albert R Ellingboe's contributions to plasma processing technology have made a significant impact on the industry. His innovative patents and collaborative efforts continue to drive advancements in this critical area of research and development.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile