Alan J Fleming

Title: Alan J Fleming - Innovator in Wafer Loading Systems

Introduction

Alan J Fleming is a notable inventor based in Santa Clara, CA (US). He has made significant contributions to the field of integrated circuit manufacturing, particularly through his innovative designs and systems.

Latest Patents

Fleming holds a patent for an "Automatic Wafer Loading and Pre-Alignment System." This invention is designed for integrated circuit wafer-mask aligners. The system utilizes a belt feed track to transport wafers from a 'send' wafer storage carrier to a pre-alignment station. The mechanical pre-alignment is achieved using a roller arm and flat-finder system, ensuring precise positioning of the wafer with respect to the wafer chuck of the aligner. After pre-alignment, the aligner turntable rotates to position the pre-aligned wafer and chuck at the home position while simultaneously preparing another chuck at the pre-alignment station. If the new chuck contains a wafer, it is transferred to a 'receive' wafer storage carrier via a belt return track system. Photosensors are integrated into the system to detect the presence or absence of wafers at critical locations.

Career Highlights

Fleming's career is marked by his work at Computervision Corporation, where he has applied his expertise in developing advanced technologies for the semiconductor industry. His innovative approach has led to improvements in the efficiency and accuracy of wafer handling processes.

Collaborations

Throughout his career, Fleming has collaborated with notable colleagues, including Kenneth Levy and David Corbin. These partnerships have contributed to the advancement of technology in the field.

Conclusion

Alan J Fleming's contributions to the development of wafer loading systems have had a lasting impact on the semiconductor industry. His innovative patent reflects his commitment to enhancing manufacturing processes and improving technology.