Alan Carlson

Title: Alan Carlson - Innovator in Semiconductor Fabrication Processing

Introduction

Alan Carlson is a notable inventor based in Westborough, MA (US). He has made significant contributions to the field of semiconductor fabrication processing. His innovative work focuses on improving the efficiency and effectiveness of monitoring fabrication processes.

Latest Patents

Alan Carlson holds a patent titled "Method of monitoring fabrication processing including edge bead removal processing." This patent describes systems and methods for monitoring semiconductor wafer fabrication processing, particularly through EBR line inspection. The process involves capturing at least one image of a wafer at an intermediate stage of fabrication. The captured images are then compressed to create a composite representation of at least the edge zone of the wafer. An edge bead removal area is identified in this representation, and at least one feature attribute is extracted from the identified area. The extracted feature attribute is automatically assessed, generating information related to the status of the fabrication processing. This includes recommendations for modifications to the fabrication process, either upstream or downstream of the current stage.

Career Highlights

Alan Carlson is currently employed at Rudolph Technologies, Inc., where he applies his expertise in semiconductor technology. His work has been instrumental in advancing the methods used in the industry, ensuring higher quality and efficiency in semiconductor manufacturing.

Collaborations

Some of his notable coworkers include Ajay Pai and Tuan D Le, who collaborate with him on various projects within the company.

Conclusion

Alan Carlson's contributions to semiconductor fabrication processing through his innovative patent demonstrate his commitment to advancing technology in this critical field. His work continues to influence the industry positively.