Yao, Japan

Akio Mitsuhashi


Average Co-Inventor Count = 5.0

ph-index = 2

Forward Citations = 154(Granted Patents)


Company Filing History:


Years Active: 2004-2009

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2 patents (USPTO):Explore Patents

Title: Akio Mitsuhashi: Innovator in Plasma Processing Technology

Introduction

Akio Mitsuhashi is a notable inventor based in Yao, Japan. He has made significant contributions to the field of plasma processing, holding 2 patents that showcase his innovative approach to technology.

Latest Patents

Mitsuhashi's latest patents include a plasma processing method and apparatus. This invention involves maintaining the interior of a vacuum chamber at a specified pressure by introducing a specified gas into the chamber, which is equipped with a plasma trap. The evacuation of the chamber is performed by a pump, while a high-frequency power of 100 MHz is supplied to a counter electrode. This process allows for the generation of uniform plasma within the vacuum chamber, enabling plasma processing such as etching, deposition, and surface reforming to be carried out uniformly with a substrate placed on a substrate electrode.

Career Highlights

Mitsuhashi is associated with Matsushita Electric Industrial Co., Ltd., a company known for its advancements in electrical and electronic products. His work has contributed to the development of innovative technologies that enhance manufacturing processes.

Collaborations

Some of his notable coworkers include Tomohiro Okumura and Hideo Haraguchi, who have collaborated with him on various projects within the company.

Conclusion

Akio Mitsuhashi's contributions to plasma processing technology reflect his dedication to innovation and excellence in his field. His patents demonstrate the potential for advancements in manufacturing processes, making a significant impact on the industry.

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