Hyogo, Japan

Akinori Matsumoto


Average Co-Inventor Count = 5.0

ph-index = 3

Forward Citations = 40(Granted Patents)


Company Filing History:


Years Active: 1999-2000

Loading Chart...
3 patents (USPTO):Explore Patents

Title: Akinori Matsumoto: Innovator in Semiconductor Drying Technologies

Introduction

Akinori Matsumoto is a notable inventor based in Hyogo, Japan. He has made significant contributions to the field of semiconductor processing, particularly in drying technologies. With a total of 3 patents to his name, Matsumoto's work has had a considerable impact on the efficiency and effectiveness of semiconductor manufacturing.

Latest Patents

Matsumoto's latest patents include a drying apparatus and method using isopropyl alcohol (IPA) for semiconductor wafers. This innovative method involves feeding IPA to a nozzle, creating a film-shaped flow that descends along the inner surface of a processing vessel. The design ensures that IPA vapor is effectively utilized for condensation on the surface of the object being processed, thereby preventing defective dryness. Another patent focuses on a drying apparatus that features a nozzle and an exhaust member positioned opposite each other. The inwardly curved side wall of the processing vessel allows the nitrogen gas jet to function as a curtain, eliminating the need for a cooling coil and enhancing the stability of the IPA vapor.

Career Highlights

Throughout his career, Akinori Matsumoto has worked with prominent companies such as Mitsubishi Electric Corporation and Ryoden Semiconductor System Engineering Corporation. His experience in these organizations has contributed to his expertise in semiconductor technologies and innovations.

Collaborations

Matsumoto has collaborated with notable colleagues, including Takeshi Kuroda and Cozy Ban. These partnerships have likely fostered a creative environment that has led to advancements in their respective fields.

Conclusion

Akinori Matsumoto's contributions to semiconductor drying technologies demonstrate his innovative spirit and commitment to improving manufacturing processes. His patents reflect a deep understanding of the challenges in semiconductor processing and offer effective solutions to enhance product quality.

This text is generated by artificial intelligence and may not be accurate.
Please report any incorrect information to support@idiyas.com
Loading…