Company Filing History:
6 out of 317 
1 out of 202 Years Active: 2010-2019
Title: Innovations by Akiko Nakada in Gas Flow Monitoring
Introduction
Akiko Nakada is an inventive force hailing from Kasugai, Japan. With a robust portfolio of six patents, she has significantly contributed to the field of gas flow monitoring, particularly in applications relevant to semiconductor manufacturing. Her innovative solutions enable enhanced accuracy and efficiency in gas flow processes.
Latest Patents
Among her latest inventions, Akiko's patents include a sophisticated gas flow monitoring method and apparatus designed to utilize mass flow controllers (MFCs). This method employs a start shut-off valve positioned upstream of the MFC, in conjunction with a pressure gauge. By measuring the drop in pressure when the shut-off valve is closed, the flow rate of the process gas can be accurately inferred. This enables in-line monitoring of low process gas rates without interrupting semiconductor manufacturing operations. Additionally, she developed a gas flow-rate verification system, incorporating process gas lines, multiple cutoff valves, and a measuring tank. This system verifies flow rates effectively while maintaining consistent operational pressure through feedback controls.
Career Highlights
Throughout her career, Akiko has worked with prominent companies including CKD Corporation and Horiba Stec, Co., Ltd. Her contributions in these organizations have paved the way for critical advancements in gas management technologies.
Collaborations
Akiko Nakada's innovative journey is also marked by her collaborations with fellow professionals such as Minoru Ito and Hiroki Doi. These partnerships have helped drive the development of effective solutions that address complex challenges in the industry.
Conclusion
In conclusion, Akiko Nakada's inventive work in the field of gas flow monitoring exemplifies her skill and dedication as an inventor. Her contributions not only support the semiconductor manufacturing process but also enhance the overall efficiency and reliability of gas flow systems. With numerous patents under her belt, Nakada continues to be a pivotal figure in advancing technology within her industry.