Toyama, Japan

Akihiro Tanoue


Average Co-Inventor Count = 3.0

ph-index = 5

Forward Citations = 64(Granted Patents)


Company Filing History:


Years Active: 2001-2008

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8 patents (USPTO):Explore Patents

Title: Innovations by Akihiro Tanoue: Advancements in Polishing Technology

Introduction: Akihiro Tanoue, based in Toyama, Japan, is a distinguished inventor renowned for his contributions to the field of polishing technologies. With an impressive portfolio of eight patents, Tanoue has made significant strides in refining methods that enhance the efficiency and effectiveness of wafer polishing processes.

Latest Patents: One of Tanoue's latest patents centers around a novel polishing method that incorporates a slurry feeding apparatus. This apparatus features a closed slurry bottle, piping, a wet nitrogen generator, and various components such as suction and spray nozzles, temperature regulators, and flow rate control valves. The method allows for continuous operation of the slurry delivery pump while a wafer is being polished, and it intermittently starts and stops during idle periods, effectively managing the slurry without using a traditional stirrer. This innovative approach allows the slurry to be stirred by the spraying mechanism through the nozzle, optimizing the polishing process.

Career Highlights: Tanoue's work at Matsushita Electric Industrial Co., Ltd. has established him as a key figure in the development of advanced polishing systems. His focus on efficiency and operational control has paved the way for advancements in semiconductor manufacturing and other related industries.

Collaborations: Throughout his career, Tanoue has collaborated with colleagues such as Yoshiharu Hidaka and Shin Hashimoto. These partnerships reflect a shared dedication to innovation and the pursuit of excellence in technology.

Conclusion: Akihiro Tanoue's contributions to polishing technology exemplify the impact of innovative thinking in engineering. With multiple patents to his name, his work continues to influence the efficiency of wafer polishing processes and highlights the importance of collaboration in the advancement of technology. As industries evolve, inventors like Tanoue will play a pivotal role in shaping the future of manufacturing.

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