Company Filing History:
Years Active: 1989
Title: Akhil Bhargava: Innovator in Wafer Transfer Technology
Introduction
Akhil Bhargava is a notable inventor based in Reading, MA (US). He has made significant contributions to the field of semiconductor processing through his innovative designs and patents. His work primarily focuses on improving the efficiency and accuracy of wafer transfer systems.
Latest Patents
Akhil Bhargava holds a patent for a "Wafer Transfer System." This invention involves a wafer transfer apparatus designed for the horizontal transfer of a wafer between a cassette and an input station of a vacuum processing system. The system includes a wafer transfer arm with a primary section linked to a secondary section, allowing for the straight-line movement of a wafer to a location and orientation station before reaching the input station. The actual location of the wafer center and the angular orientation of the wafer flat are determined, enabling the wafer to be rotated to a desired angular orientation. A solar cell is utilized to sense the actual wafer position by detecting the wafer edge during rotation. The required corrections and rotations are calculated based on the solar cell output, ensuring precise positioning at the input station. Additionally, a strain gauge is employed to reliably sense the presence or absence of the wafer on the transfer arm.
Career Highlights
Akhil Bhargava is currently associated with Varian Associates, Inc., where he continues to develop and refine technologies related to wafer processing. His expertise in this area has positioned him as a valuable asset to his team and the industry.
Collaborations
Throughout his career, Akhil has collaborated with several professionals, including Richard John Hertel and Adrian C Delforge. These collaborations have contributed to the advancement of technology in wafer processing and have fostered innovation within the field.
Conclusion
Akhil Bhargava's contributions to wafer transfer technology exemplify his commitment to innovation and excellence in the semiconductor industry. His patent and ongoing work continue to influence the efficiency of wafer processing systems.