Sagamihara, Japan

Akemi Satoh


Average Co-Inventor Count = 9.0

ph-index = 2

Forward Citations = 320(Granted Patents)


Company Filing History:


Years Active: 1995-1997

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2 patents (USPTO):Explore Patents

Title: Akemi Satoh: Innovator in Semiconductor Technology

Introduction

Akemi Satoh is a prominent inventor based in Sagamihara, Japan. She has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. Her work focuses on innovative methods for manufacturing semiconductor devices, particularly through the use of advanced materials.

Latest Patents

Among her latest patents, Akemi has developed a method for manufacturing a semiconductor device that involves a silicon oxide film containing fluorine. This film exhibits a low dielectric constant and low hygroscopicity, serving as an effective insulating film for electrically isolating wirings within semiconductor devices. The method utilizes a plasma CVD technique with a source gas that includes silicon, oxygen, and fluorine, under specific conditions that satisfy a defined relationship between gas pressure and ion energy.

Career Highlights

Akemi Satoh is currently employed at Kabushiki Kaisha Toshiba, a leading company in the technology sector. Her role involves pioneering research and development in semiconductor manufacturing processes. Her innovative approaches have positioned her as a key figure in her field.

Collaborations

Throughout her career, Akemi has collaborated with notable colleagues, including Yukio Nishiyama and Rempei Nakata. These partnerships have fostered a collaborative environment that enhances the development of cutting-edge technologies.

Conclusion

Akemi Satoh's contributions to semiconductor technology exemplify her dedication to innovation and excellence. Her patents reflect her expertise and commitment to advancing the field, making her a significant figure in the world of technology.

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