This inventor holds 1 USPTO granted patent. Top assignee: Samsung Electronics Co., Ltd.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Ahjin Cho: Inventor in Semiconductor Substrate Processing
Introduction
Ahjin Cho is an inventor based in Suwon, South Korea, and is associated with Samsung Electronics Ltd. His work includes an invention concerning substrate processing equipment and methods for cleaning process tubes.
Latest Patents
Cho is credited with 1 patent: “Substrate Processing Apparatus, Cleaning Substrate Processing Apparatus Cleaning Method, and Substrate Processing Method Including the Same.” The disclosed cleaning method inserts a boat into a process tube and removes deposited materials through two successive removal processes. The first process supplies the tube with a first gas, and the second supplies it with a second gas. One gas is chlorine-based, while the other is fluorine-based.
Career Highlights
Cho’s listed patent focuses on cleaning process tubes used in substrate processing. Its two-stage approach uses different gas chemistries to remove deposited materials, addressing an equipment-cleaning step in semiconductor manufacturing.
Collaborations
Cho’s listed coworkers include Woong Lee and Giduck Kweon. They are associated with the patent record alongside his work at Samsung Electronics Ltd.
Conclusion
Ahjin Cho’s patent contribution centers on a two-stage, gas-based method for cleaning substrate-processing equipment, reflecting his work in semiconductor manufacturing technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile