Company Filing History:
Years Active: 2018-2020
Title: Adarsh Basavalingappa: Innovator in Selective Etching Technologies
Introduction
Adarsh Basavalingappa is a notable inventor based in Albany, NY (US). He has made significant contributions to the field of etching technologies, holding a total of 3 patents. His work focuses on methods that enhance the precision and efficiency of etching processes, which are crucial in various manufacturing applications.
Latest Patents
One of Adarsh's latest patents is titled "Method for selectively etching with reduced aspect ratio dependence." This innovative method provides a process for selectively etching an etch layer with respect to a mask. The etch process consists of multiple etch cycles, each comprising a deposition phase and an etch phase. During the deposition phase, a flow of a deposition phase gas, which includes a fluorocarbon or hydrofluorocarbon containing gas and an oxygen containing gas, is introduced. This gas mixture is subjected to RF power, forming a plasma before the deposition phase is halted. The etch phase follows, where a different flow of etch phase gas is used, characterized by a lower fluorocarbon or hydrofluorocarbon to oxygen ratio compared to the deposition phase gas. This innovative approach aims to improve the etching process's selectivity and efficiency.
Career Highlights
Adarsh Basavalingappa is currently employed at Lam Research Corporation, a leading company in the semiconductor manufacturing equipment industry. His work at Lam Research has allowed him to apply his innovative ideas in a practical setting, contributing to advancements in etching technologies.
Collaborations
Adarsh has collaborated with several talented individuals in his field, including Peng Wang and Bhaskar Nagabhirava. These collaborations have fostered a creative environment that encourages the development of cutting-edge technologies.
Conclusion
Adarsh Basavalingappa is a prominent inventor whose work in selective etching technologies has made a significant impact in the semiconductor industry. His innovative methods and collaborative spirit continue to drive advancements in this critical field.
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