For the Inventor, By the Inventor

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Gloucester, MA, United States of America

Varian Semiconductor Associates, Inc.

USPTO Granted Patents = 3

Forward Citations = 5

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6 inventors (with patents filed for the assignee):

Atul Gupta (2 out of 32 patents)

Scott E Peitzsch (1 out of 7 patents)

David E Suuronen (1 out of 22 patents)

4. San Yu (1 out of 5 patents)

5. Gregg Alexander Norris (1 out of 6 patents)

6. Joseph C Olson (1 out of 130 patents)

3 patents: Sort by Forward Citations

1. 9417280 - System and method for analyzing voltage breakdown in electrostatic chucks (2016-08-16),

2. 8664027 - LED mesa sidewall isolation by ion implantation (2014-03-04),

3. 7453070 - Methods and apparatus for beam density measurement in two dimensions (2008-11-18),

Company Badge

USPTO Data Jan 1 1976 - Dec 30 2025

3 Patents

#12 in Gloucester, MA

#3,876 in Massachusetts

#72,003 in US

Gloucester, MA, United States of America

Varian Semiconductor Associates, Inc.

Forward Citations = 5

6 inventors:

Atul Gupta (2 out of 32 patents)

Scott E Peitzsch (1 out of 7 patents)

David E Suuronen (1 out of 22 patents)

4. San Yu (1 out of 5 patents)

5. Gregg Alexander Norris (1 out of 6 patents)

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