For the Inventor, By the Inventor

Enter assignee name

Tokyo Electron Kabushiki

USPTO Granted Patents = 2

Forward Citations = 495

Loading Chart...

Loading Chart...

5 inventors (with patents filed for the assignee):

Akihito Yamamoto (1 out of 50 patents)

Kenichi Yamaga (1 out of 38 patents)

Yuichi Mikata (1 out of 7 patents)

4. Yuji Ono (1 out of 6 patents)

5. Katsuhiko Mihara (1 out of 9 patents)

2 patents: Sort by Forward Citations

1. 5527390 - Treatment system including a plurality of treatment apparatus (1996-06-18),

2. 5484484 - Thermal processing method and apparatus therefor (1996-01-16),

Company Badge

USPTO Data Jan 1 1976 - Dec 30 2025

2 Patents

#4,066 in Tokyo

#10,973 in Japan

Tokyo Electron Kabushiki

Forward Citations = 495

5 inventors:

Akihito Yamamoto (1 out of 50 patents)

Kenichi Yamaga (1 out of 38 patents)

Yuichi Mikata (1 out of 7 patents)

4. Yuji Ono (1 out of 6 patents)

5. Katsuhiko Mihara (1 out of 9 patents)

Please report any incorrect information to support@idiyas.com

Loading…