For the Inventor, By the Inventor

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Leuven, Belgium

Internuiversitair Microelektronica Centrum

USPTO Granted Patents = 1

Forward Citations = 39

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2 inventors (with patents filed for the assignee):

Guy Vereecke (1 out of 4 patents)

Marc A Meuris (1 out of 25 patents)

1 patent: Sort by Forward Citations

1. 6576151 - Etching of silicon nitride by anhydrous halogen gas (2003-06-10),

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USPTO Data Jan 1 1976 - Dec 30 2025

1 Patents

#58 in Leuven

#1,312 in Belgium

Leuven, Belgium

Internuiversitair Microelektronica Centrum

Forward Citations = 39

2 inventors:

Guy Vereecke (1 out of 4 patents)

Marc A Meuris (1 out of 25 patents)

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