Saitama, Japan

Hitachi High-tech Fine Systems Corporation


USPTO Granted Patents = 5


Forward Citations = 16

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24 inventors (with patents filed for the assignee):

goldMedal Akihiko Kandori (2 out of 84 patents)

silverMedal Ryuzo Kawabata (2 out of 13 patents)

bronzeMedal Nobuhiro Chihara (1 out of 9 patents)

4 Takahiro Daikoku (1 out of 4 patents)

5 Masahiko Honda (1 out of 18 patents)

6 Toshihide Kishi (1 out of 1 patent)

7 Masashi Shinbo (1 out of 1 patent)

8 Kiyotake Horie (1 out of 1 patent)

9 Hideyasu Suzuki (1 out of 1 patent)

10 Takeshi Kurokawa (1 out of 1 patent)

11 Tomohiko Kai (1 out of 1 patent)

12 Masaki Araki (1 out of 1 patent)

13 Tomoya Sasaki (1 out of 2 patents)

14 Takeshi Iga (1 out of 1 patent)

15 Tomoharu Isozaki (1 out of 1 patent)


5 patents:

Hitachi High-tech Fine Systems Corporation is a leading provider of high-precision equipment and systems for semiconductor manufacturing. With a focus on innovation and reliability, the company offers a wide range of solutions including thin film deposition systems, etching systems, and metrology equipment. Their cutting-edge technology and commitment to customer satisfaction have established them as a trusted partner in the industry.
This text is generated by artificial intelligence and may not be accurate.

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USPTO Data Jan 1 1976 - Dec 23 2025

5 Patents

#93 in Saitama 343-0827

#6,488 in Japan

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Saitama, Japan
Forward Citations = 16

24 inventors:

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