Saitama, Japan

Hitachi High-tech Fine Systems Corporation


Patents = 5

Forward Citations = 16


where 'Filed Patents' based on already Granted Patents

where 'Inventors Filed' based on already Granted Patents


24 inventors (with patents filed for the assignee):


Hitachi High-tech Fine Systems Corporation is a leading provider of high-precision equipment and systems for semiconductor manufacturing. With a focus on innovation and reliability, the company offers a wide range of solutions including thin film deposition systems, etching systems, and metrology equipment. Their cutting-edge technology and commitment to customer satisfaction have established them as a trusted partner in the industry.
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