Company Badge
USPTO Data Jan 1 1976 - Oct 6 2026
5 Patents
#110 in Saitama 343-0827
#6,651 in Japan
Hitachi High-Tech Fine Systems Corporation
Forward Citations = 18
24 inventors:
Hitachi High-Tech Fine Systems Corporation
EPO Patents = 1
Forward Citations = 18
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24 inventors (with patents filed for the assignee):
Akihiko Kandori (2 out of 86 patents)
Ryuzo Kawabata (2 out of 13 patents)
Nobuhiro Chihara (1 out of 9 patents)
4. Takahiro Daikoku (1 out of 6 patents)
5. Masahiko Honda (1 out of 18 patents)
6. Toshihide Kishi (1 out of 1 patent)
7. Masashi Shinbo (1 out of 1 patent)
8. Kiyotake Horie (1 out of 1 patent)
9. Hideyasu Suzuki (1 out of 1 patent)
10. Takeshi Kurokawa (1 out of 1 patent)
11. Tomohiko Kai (1 out of 1 patent)
12. Masaki Araki (1 out of 1 patent)
13. Tomoya Sasaki (1 out of 2 patents)
14. Takeshi Iga (1 out of 1 patent)
15. Tomoharu Isozaki (1 out of 1 patent)
5 patents:
Company Overview
Hitachi High-tech Fine Systems Corporation is a leading provider of high-precision equipment and systems for semiconductor manufacturing. With a focus on innovation and reliability, the company offers a wide range of solutions including thin film deposition systems, etching systems, and metrology equipment. Their cutting-edge technology and commitment to customer satisfaction have established them as a trusted partner in the industry.
Profile summary synthesized from public USPTO records and patent filings.
IDiyas Innovation Intelligence. (2026). Company Patent Portfolio: Hitachi High-Tech Fine Systems Corporation. Retrieved from https://idiyas.com/company/hitachi-high-tech-fine-systems
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
1 patent (EPO):
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]