The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2014
Filed:
Mar. 14, 2013
Applicants:
Peter Nicholas Heys, Crewe, GB;
Andrew Kingsley, Newton, GB;
Fuquan Song, Eastham, GB;
Paul Williams, Wirral, GB;
Thomas Leese, Alsager, GB;
Hywel Owen Davies, Mold, GB;
Rajesh Odedra, Altrincham, GB;
Inventors:
Peter Nicholas Heys, Crewe, GB;
Andrew Kingsley, Newton, GB;
Fuquan Song, Eastham, GB;
Paul Williams, Wirral, GB;
Thomas Leese, Alsager, GB;
Hywel Owen Davies, Mold, GB;
Rajesh Odedra, Altrincham, GB;
Assignee:
Sigma-Aldrich Co. LLC, St. Louis, MO (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05H 1/24 (2005.12); C23C 16/00 (2005.12); C23C 8/00 (2005.12);
U.S. Cl.
CPC ...
Abstract
Methods of forming titanium-containing films by atomic layer deposition are provided. The methods comprise delivering at least one precursor to a substrate, wherein the at least one precursor corresponds in structure to Formula I: wherein: