The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2010
Filed:
Jul. 28, 1999
Junichi Hagihara, Nirasaki, JP;
Shinji Iino, Kitakoma-gun, JP;
Junichi Hagihara, Nirasaki, JP;
Shinji Iino, Kitakoma-gun, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A conventional probe card is very complex in a support structure of probe terminals and it has been difficult to change an array of the probe terminals correspondingly to various arrays of electrode pads of an object to be checked. A contactor () of the present invention simultaneously sets its probe terminals in contact with a plurality of electrode pads of an object to be checked and electrical checking of the object is made once or a plurality of times. It has a plurality of first electrodes () arranged on a first substrate (silicon substrate) () and probe terminals () respectively provided on these electrodes (). The probe terminal () has a conductive support () provided on the first electrode, elastic support plate () whose one end is fixed to the upper end of the conductive support column (), and probe terminal (bump)fixed to the free end portion of the elastic support plate ().