The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 2010
Filed:
Nov. 15, 2006
Konstantin Nikolaevitch Koshelev, Troitsk, RU;
Frederik Bijkerk, Amsterdam, NL;
Givi Georgievitch Zukavishvili, Troitsk, RU;
Evgenii Dmitreevitch Korop, Troisk, RU;
Vladimir Vital'evitch Ivanov, Moscow, RU;
Konstantin Nikolaevitch Koshelev, Troitsk, RU;
Frederik Bijkerk, Amsterdam, NL;
Givi Georgievitch Zukavishvili, Troitsk, RU;
Evgenii Dmitreevitch Korop, Troisk, RU;
Vladimir Vital'evitch Ivanov, Moscow, RU;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A radiation source includes an anode and a cathode for creating a discharge in a vapor in a space between anode and cathode and to form a plasma of a working vapor so as to generate electromagnetic radiation. The cathode defines a hollow cavity in communication with the discharge region through an aperture that has a substantially annular configuration around a central axis of said radiation source so as to initiate said discharge. A driver vapor is supplied to the cathode cavity and the working vapor is supplied in a region around the central axis in between anode and cathode.