The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 12, 2018
Filed:
Jun. 22, 2016
Applicant:
K.c. Tech Co., Ltd., Anseong-si, KR;
Inventors:
Assignee:
KCTECH CO., LTD., Anseong-si, KR;
Primary Examiner:
Int. Cl.
CPC ...
C09K 13/00 (2006.01); C03C 15/00 (2006.01); C03C 25/68 (2006.01); H01L 21/302 (2006.01); H01L 21/461 (2006.01); C09G 1/02 (2006.01); C09K 3/14 (2006.01); H01L 21/321 (2006.01); H01L 21/306 (2006.01); C23F 3/06 (2006.01); C23F 1/10 (2006.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01); C09K 3/14 (2013.01); C09K 13/00 (2013.01); C23F 3/06 (2013.01); H01L 21/30625 (2013.01); H01L 21/32115 (2013.01); C23F 1/10 (2013.01);
Abstract
A slurry composition for polishing tungsten is provided. The slurry composition for polishing tungsten may include a water-soluble polymer, abrasive particles and an etching adjuster.