The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2018
Filed:
May. 15, 2017
Applied Materials, Inc., Santa Clara, CA (US);
Vijay D. Parkhe, San Jose, CA (US);
Konstantin Makhratchev, Fremont, CA (US);
Jason Della Rosa, Campbell, CA (US);
Hamid Noorbakhsh, Fremont, CA (US);
Brad L. Mays, Findlay, OH (US);
Douglas A. Buchberger, Jr., Livermore, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A substrate support assembly includes a ceramic puck and a thermally conductive base having an upper surface that is bonded to a lower surface of the ceramic puck. The thermally conductive base includes a plurality of thermal zones and a plurality of thermal isolators that extend from the upper surface of the thermally conductive base towards a lower surface of the thermally conductive base, wherein each of the plurality of thermal isolators provides approximate thermal isolation between two of the plurality of thermal zones at the upper surface of the thermally conductive base.