The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2018
Filed:
Sep. 13, 2016
Nexperia B.v., AB Nijmegen OT, NL;
Steven Thomas Peake, Warrington, GB;
Nexperia B.V., Nijmegen, NL;
Abstract
A process of manufacturing a device is disclosed. The process includes forming an epitaxial layer of a first conductivity type on in a substrate, forming a first vertical section of a second conductivity type in the expitaxial layer, creating a first vertical trench through etching vertically next to the first vertical section, filling the first vertical trench with a first type oxide, forming a second vertical trench in the first vertical trench. The second vertical trench is bounded by the first type oxide in the first vertical trench. The process further includes forming a second type oxide on inner walls of the second vertical trench, filling the second vertical trench with polysilicon. In a second vertical section of the epitaxial layer vertically next to the first vertical trench, a body region is created by implanting ions of the first conductivity type and a source region is created by implanting ions in a top layer of the body region.