The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2018
Filed:
Aug. 02, 2016
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Takashi Ando, Tuckahoe, NY (US);
Mohit Bajaj, Bangalore, IN;
Terence B. Hook, Jericho, VT (US);
Rajan K. Pandey, Bangalore, IN;
Rajesh Sathiyanarayanan, Bangalore, IN;
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/28 (2006.01); H01L 21/02 (2006.01); H01L 21/3115 (2006.01); H01L 21/8234 (2006.01); H01L 21/225 (2006.01); H01L 27/088 (2006.01); H01L 29/10 (2006.01); H01L 29/51 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 21/324 (2006.01); H01L 29/49 (2006.01);
U.S. Cl.
CPC ...
H01L 21/28185 (2013.01); H01L 21/0217 (2013.01); H01L 21/225 (2013.01); H01L 21/28176 (2013.01); H01L 21/3115 (2013.01); H01L 21/31155 (2013.01); H01L 21/324 (2013.01); H01L 21/823462 (2013.01); H01L 27/088 (2013.01); H01L 29/1054 (2013.01); H01L 29/495 (2013.01); H01L 29/4966 (2013.01); H01L 29/511 (2013.01); H01L 29/517 (2013.01); H01L 29/66477 (2013.01); H01L 29/7849 (2013.01);
Abstract
A method for adjusting a threshold voltage includes depositing a strained liner on a gate structure to strain a gate dielectric. A threshold voltage of a transistor is adjusted by controlling an amount of strain in the liner to control an amount of work function (WF) modulating species that diffuse into the gate dielectric in a channel region. The liner is removed.