The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2018
Filed:
Nov. 18, 2015
Applicant:
Nuflare Technology, Inc., Yokohama, JP;
Inventors:
Assignee:
NuFlare Technology, Inc., Yokohama, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/302 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3026 (2013.01); H01J 2237/31764 (2013.01); H01J 2237/31774 (2013.01);
Abstract
A method for generating writing data to be input to a writing apparatus, which writes a figure pattern on a target object by using a charged particle beam, includes generating the writing data, based on a data format that sequentially defines figure information on a figure pattern, and dose information which is defined before or after the figure information and indicates one of a dose and a dose modulation rate for modulating a dose, for a position of each of corner points of the figure pattern.