The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2018
Filed:
Jul. 22, 2016
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
William G. Schultz, San Jose, CA (US);
Gildardo R. Delgado, Livermore, CA (US);
Frances Hill, Sunnyvale, CA (US);
Edgardo Garcia Berrios, San Jose, CA (US);
Rudy Garcia, Union City, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 1/34 (2006.01); H01J 1/304 (2006.01); H01J 9/02 (2006.01); H01J 19/24 (2006.01);
U.S. Cl.
CPC ...
H01J 1/3044 (2013.01); H01J 1/34 (2013.01); H01J 9/025 (2013.01); H01J 19/24 (2013.01); H01J 2201/30411 (2013.01); H01J 2201/30449 (2013.01); H01J 2201/30492 (2013.01); H01J 2209/0223 (2013.01);
Abstract
An emitter containing a metal boride material has an at least partly rounded tip with a radius of 1 μm or less. An electric field can be applied to the emitter and an electron beam is generated from the emitter. To form the emitter, material is removed from a single crystal rod to form an emitter containing a metal boride material having a rounded tip with a radius of 1 μm or less.