The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2018
Filed:
Apr. 04, 2012
Chih-tsung Lee, Hsinchu, TW;
Hung Jui Chang, Shetou Shiang, TW;
You-hua Chou, Taipei, TW;
Shiu-ko Jangjian, Tainan, TW;
Chung-en Kao, Toufen Township, TW;
Ming-chin Tsai, Hsinchu, TW;
Huan-wen Lai, Tainan, TW;
Chih-Tsung Lee, Hsinchu, TW;
Hung Jui Chang, Shetou Shiang, TW;
You-Hua Chou, Taipei, TW;
Shiu-Ko Jangjian, Tainan, TW;
Chung-En Kao, Toufen Township, TW;
Ming-Chin Tsai, Hsinchu, TW;
Huan-Wen Lai, Tainan, TW;
Taiwan Semiconductor Manufacturing Co. Ltd., Hsin-Chu, TW;
Abstract
An apparatus comprises: a shower head having a supply plenum for supplying the gas to the chamber and a vacuum manifold fluidly coupled to the supply plenum; and at least one vacuum system fluidly coupled to the vacuum manifold of the shower head.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile