The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2018
Filed:
Nov. 21, 2014
Lasertec Corporation, Yokohama, JP;
Hiroto Nozawa, Kanagawa, JP;
Kuniaki Takeda, Yokohama, JP;
Kenshi Ishiwatari, Yokohama, JP;
Takamasa Tsubouchi, Yokohama, JP;
Ryoichiro Satoh, Yokohama, JP;
Lasertec Corporation, Yokohama, JP;
Abstract
An inspection apparatus and an inspection method capable of performing an inspection more accurately are provided. An inspection apparatus according to the present invention includes a light sourcethat illuminates a samplein which a pattern is formed, a detectorthat detects light reflected from the sampleilluminated by the light source, and a processing devicethat performs an inspection based on a correlation between a brightness value of a sample image obtained by the detector and a size in a surface shape or a size in a width direction of the pattern of the sample. The processing deviceperforms the inspection based on a summation value obtained by adding up brightness values of sample images with weights, the sample images being obtained under a plurality of shooting conditions.