The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2018
Filed:
Sep. 23, 2015
American Air Liquide, Inc., Fremont, CA (US);
L'air Liquide, Société Anonyme Pour L'etude ET L'exploitation Des Procédés Georges Claude, Paris, FR;
Claudia Fafard, Newark, DE (US);
Venkateswara R. Pallem, Hockessin, DE (US);
Jean-Marc Girard, Versailles, FR;
L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés George Claude, Paris, FR;
American Air Liquide, Inc., Fremont, CA (US);
Abstract
Disclosed are Si-containing film forming compositions comprising carbosilane substituted amine precursors. The carbosilane substituted amine precursors have the formula (R)N(—SiHR—CH—SiHR), wherein a=0 or 1; Ris H, a C1 to C6 alkyl group, or a halogen; Rand Ris each independently H; a halogen; an alkoxy group having the formula OR', wherein R′ is an alkyl group (C1 to C6); or an alkylamino group having the formula NR″, wherein each R″ is independently H, a C1-C6 alkyl group, a C1-C6 alkenyl group, or a C3-C10 aryl or heterocycle group. Also disclosed are methods of synthesizing the carbosilane substituted amine precursors and their use for deposition processes.