The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 08, 2018

Filed:

Nov. 24, 2015
Applicant:

United Microelectronics Corp., Hsinchu, TW;

Inventors:

Liang Yi, Singapore, SG;

Ko-Chi Chen, Taoyuan, TW;

Shen-De Wang, Hsinchu County, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/11578 (2017.01); H01L 29/423 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11578 (2013.01); H01L 29/4236 (2013.01);
Abstract

A semiconductor structure and a manufacturing method thereof are provided. The semiconductor structure includes a semiconductor substrate, a non-volatile memory cell, and a gate stack. The non-volatile memory cell is formed in the semiconductor substrate, and a top surface of the non-volatile memory cell is coplanar with or below a top surface of the semiconductor substrate. The gate stack is formed on the semiconductor substrate.


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