The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2018
Filed:
Oct. 25, 2013
Applicant:
Materion Advanced Materials Germany Gmbh, Hanau, DE;
Inventors:
Carl Christoph Stahr, Alzenau, DE;
Martin Schlott, Offenbach, DE;
Assignee:
MATERION ADVANCED MATERIALS GERMANY GMBH, Hanau, DE;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/00 (2006.01); H01J 37/34 (2006.01); C23C 14/08 (2006.01); C23C 14/34 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3429 (2013.01); C23C 14/083 (2013.01); C23C 14/3414 (2013.01); H01J 37/3426 (2013.01);
Abstract
The invention relates to a sputtering target containing a sputtering material containing a metal oxide. The sputtering material contains zirconium and titanium as metals and contains at least one mixed oxide phase.