The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2018
Filed:
Feb. 18, 2014
Applied Materials, Inc., Santa Clara, CA (US);
Martin Lee Riker, Milpitas, CA (US);
Uday Pai, San Jose, CA (US);
William Fruchterman, Santa Clara, CA (US);
Keith A. Miller, Mountain View, CA (US);
Muhammad M. Rasheed, San Jose, CA (US);
Thanh X. Nguyen, San Jose, CA (US);
Kirankumar Savandaiah, Bangalore, IN;
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Embodiments of target assemblies for use in substrate processing chambers are provided herein. In some embodiments, a target assembly includes a plate comprising a first side including a central portion and a support portion; a target disposed on the central portion; a plurality of recesses formed in the support portion; and a plurality of pads partially disposed in the plurality of recesses.