The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2018
Filed:
Dec. 07, 2016
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Hiroshi Marumoto, Kumamoto, JP;
Hisashi Kawano, Kumamoto, JP;
Hiromi Kiyose, Kumamoto, JP;
Mitsunori Nakamori, Kumamoto, JP;
Kazuyuki Mitsuoka, Kumamoto, JP;
Assignee:
Tokyo Electron Limited, Tokoy, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01); H01L 21/461 (2006.01); H01L 21/3065 (2006.01); H01L 21/02 (2006.01); H01L 21/306 (2006.01); H01L 21/311 (2006.01); H01L 21/324 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/3065 (2013.01); H01L 21/02057 (2013.01); H01L 21/30604 (2013.01); H01L 21/31111 (2013.01); H01L 21/31116 (2013.01); H01L 21/324 (2013.01); H01L 21/6704 (2013.01); H01L 21/67069 (2013.01); H01L 21/67075 (2013.01);
Abstract
A substrate processing method according to the present disclosure includes: a liquid processing process of supplying a processing liquid to a substrate having a surface on which a pattern having a plurality of convex portions is formed; a drying process of removing the processing liquid existing on the surface of the substrate dry the substrate, and a separating process of separating a sticking portion between adjacent ones of the convex portions after the drying process.