The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2018
Filed:
Mar. 30, 2015
Asml Netherlands B.v., Veldhoven, NL;
Andrey Alexandrovich Nikipelov, Eindhoven, NL;
Johannes Antonius Gerardus Akkermans, Veldhoven, NL;
Leonardus Adrianus Gerardus Grimminck, Veldhoven, NL;
Erik Roelof Loopstra, Eindhoven, NL;
Michael Jozef Mathijs Renkens, Sittard, NL;
Adrian Toma, Veldhoven, NL;
Han-Kwang Nienhuys, Utrecht, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
An undulator for a free electron laser includes a pipe for an electron beam and one or more periodic magnetic structures extending axially along the pipe. Each periodic magnetic structure includes a plurality of magnets and a plurality of passive ferromagnetic elements, the plurality of magnets being arranged alternately with the plurality of passive ferromagnetic elements in a line extending in an axial direction. Each of the plurality of magnets is spatially separated from the pipe, and each of the passive ferromagnetic elements extends radially from an adjacent magnet towards the pipe. A spacer element may be provided between the magnets and the pipe to provide radiation shielding for the magnets and/or cooling for the pipe.