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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9952161 B1

PDFFull Text
Expired
Date of Patent:
Apr. 24, 2018

Filed:

Dec. 30, 2015

Methods for obtaining and analyzing digital interferometric data for computer testing and developing semiconductor and anisotropic devices and materials

Applicant:

Attofemto, Inc., Lake Oswego, OR (US);

Inventor:

Paul L. Pfaff, Lake Oswego, OR (US);

Assignee:

Attofemto, Inc., Lake Oswego, OR (US);

Attorneys:

George C. Rondeau, Jr.

Davis Wright Tremaine LLP

Primary Examiner:

Michael A Lyons

Int. Cl.
CPC ...
G01B 11/02 (2006.01); G01N 21/95 (2006.01); G01B 11/24 (2006.01); G01N 21/17 (2006.01); G01N 21/23 (2006.01); H01L 21/66 (2006.01); G01B 11/16 (2006.01); G01B 9/02 (2006.01); G01B 9/021 (2006.01);
U.S. Cl.
CPC ...
G01N 21/9505 (2013.01); G01B 9/021 (2013.01); G01B 9/02011 (2013.01); G01B 11/164 (2013.01); G01B 11/2441 (2013.01); G01N 21/1717 (2013.01); G01N 21/23 (2013.01); G01N 21/9501 (2013.01); H01L 22/12 (2013.01); G01N 2021/1721 (2013.01); G01N 2201/12 (2013.01);
Abstract

An interferometric holographic instrument enables the generation of digital data for testing and enabling 2-dimensional and 3-dimensional analysis of 'live' and real-time semiconductor or anisotropic devices and materials. The digitally recorded interferometric data can be displayed, stored or connected to a live data stream for transmission to digital processing devices. A digital electric processor or analyzer connected to the recording device, or live data stream, enables the interferometric data to be utilized to test, develop, and shape semiconductor and anisotropic microelectronic processing, wireless and microwave devices.

Find Patent Forward Citations

Pfaff, Paul. (2018). Methods for obtaining and analyzing digital interferometric data for computer testing and developing semiconductor and anisotropic devices and materials (U.S. Patent No. 9952161). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9952161

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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