The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2018
Filed:
Jun. 29, 2016
International Business Machines Corporation, Armonk, NY (US);
Lam Research Corporation, Fremont, CA (US);
Frank W. Mont, Troy, NY (US);
Cornelius Brown Peethala, Albany, NY (US);
Shariq Siddiqui, Albany, NY (US);
Randolph F. Knarr, Voorheesville, NY (US);
INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US);
Abstract
An environmentally green wet etch process for selective removal of cobalt metal generally includes applying water that is free of added buffers, acids, and/or bases to a substrate including exposed cobalt metal. The process can be utilized to form recesses where desired such as may be implemented for metal contact fill, metal gate fill, interconnect fill, or the like.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile