The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2018
Filed:
Sep. 26, 2016
Tokyo Electron Limited, Tokyo, JP;
Hitoshi Hashima, Kumamoto, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
An electrode rodserving as a first electrode is provided to be in contact with a flow path member and a processing liquid of a processing liquid supply path. If the processing liquid is flown in the processing liquid supply path, static electricity is generated by friction so that the processing liquid and the flow path member is electrically charged. By allowing the electrode rodto be closely contacted with the flow path member, the amount of electric charges corresponding to the sum of the charge amounts of the processing liquid and the flow path member is measured as a surface potential of the first electrode by a surface potential measuring unit. The measured surface potential is displayed on a display unit