The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2018
Filed:
Dec. 08, 2015
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Walter Pauls, Huettlingen, DE;
Hendrik Wagner, Aalen, DE;
Florian Ahles, Aalen, DE;
Christian Wald, Aalen, DE;
Steffen Fritzsche, Aalen, DE;
Norbert Wabra, Werneck, DE;
Boris Bittner, Roth, DE;
Sonja Schneider, Oberkochen, DE;
Ricarda Schoemer, Zusmarshausen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
An optical assembly, in particular for a lithography system for imaging lithographic micro- or nanostructures, includes at least two optical elements arranged successively in a beam path of the optical assembly, an acquisition device designed to acquire radiation signals from marking elements on or at the at least two optical elements, and a control device coupled to the acquisition device and which is designed to determine the plurality of properties of the optically active surface of the at least two optical elements as a function of the information contained in the radiation signals originating from the marking elements. The disclosure also relates to a method for operating the optical assembly.